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Nano-Patterned Sapphire Substrate
Industry type:Productivity and energy
Product model number:NPSS
Aurotek Corporation
award 3

Difference between NPSS from Aurotek and typical PSS is manufacture technology.

Manufacture technology of typical PSS adopts traditional semi-conductor process. First, coating photo resist on substrate, and then exposure it with mask and UV light to get photo resist patterns, and then dry etching. Flat surface of substrate will become cone shape after process. However, sapphire is material with high hardness and anti-etching characteristic. Polishing technology nowadays brings serious warping problem when it goes to bigger size. Usually etching time also becomes longer. After process, target pattern size also deformed or displaced. As a result, low apacity and low yield rate are two restrictions for PSS manufacturing. When market demand goes to NPSS, tradition semi-conductor process faces more difficulties.

Aurotek adopted imprinting method to produce NPSS. Patterns on master mold are printed to soft resin material as working stamper. Put working stamper on UV resin coated sapphire substrate and imprint. After demolding, pattern on master mold can be copied to sapphire substrate, and then dry etching. Advantage of imprinting process is that there is only one time semi-conductor process in making pattern on mold. After that, the same pattern can be copied to every substrate many times. Therefore, pattern deviation can be reduced and there’s no difficulty when substrate goes bigger. Process like attaching, imprinting, and demolding can be integrated to one equipment, which reduces process time and cost. Dry etching time also reduces because of smaller pattern, which creates more capacity of equipment.

Epitaxy house (user) also commented that brightness and electricity characteristics are almost the same with typical PSS after epitaxy. Moreover, wavelength can be centralized by using NPSS, which means NPSS has advantages of reducing inventory and creating more margins.


About Aurotek Corporation

Established in 1980, Aurotek has been upholding the belief of honesty and making the best better in our managerial philosophy. From distributing mechanical transmission, driving components to self-developed automation devices, we have now established our own brand; Aurotek continues solving customers’ needs. With Aurotek’s automation and robotics technology, we have always enriched and satisfied various customers’ need.


In the 1980s, Aurotek start up from distributing high quality product such as mechanical transmission, driving components from Japan.
With Aurotek’s power of product development, we successfully turn in to equipment manufacturing field from distributing components and modules design.
We uphold a belief of honesty, making the best better in our managerial philosophy. From different aspects, we provide a complete automation solution. And the nanoimprint technology, a newly successful development, is our first step of turnkey project and will utilize these experiences to other industries.
For decades, Aurotek uphold the mission of providing a complete automation solution to optimize the value of end users and working to be the leading system equipment provider. We will be able to fulfill our brand vision of by using the critical thinking & visionary strategy to accomplish better innovation and life.

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