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自动匀胶机
产业类别:生产力&能源精品
产品型号:ATOM 6500C
Advanced System Technology Co., Ltd.
award 3

聚昌科技自动光阻匀胶机ATOM 6500C,可适用于4/6吋标准晶圆光阻匀胶制程。设备主要由盒站、对准、传送、匀胶、热处理、化学品供应、排液系统及控制模块组成,藉由图形化操作接口,来进行自动光阻匀胶制程。本产品也可经由客制化CIM系统进行远程自动化生产管理。相较于传统机型,本产品具有多项独特设计与创新,提供给客户更多生产价值,产品主要特色有:

1.配置“光阻节量匀胶技术”,单次胶用量最低可达0.65cc,对比传统匀胶技术,节省光阻液用量多达50%。

2.采用全自制晶圆传送机械手臂,比传统市购机械手臂更快、更便宜、更容易维修,同时更方便依照客户需求进行性能优化。

3.在标准生产模式下,产能比竞争机型提升约30%。

4.传送手臂配备有独特的第三牙叉,专供传送晶圆进入匀胶模块使用,可以避免牙叉积热影响晶圆温度,提升膜厚匀胶均匀性。

5.比传统产品多一个下货盒站,可以有效提升作业员效率,并降低生产断料风险。

6.使用自行开发软件,可以配合需求快速提供客制化功能。

http://www.ast-taiwan.com.tw

关于 Advanced System Technology Co., Ltd.

Advanced System Technology Co., Ltd., was established in 2002. AST specializes in high-precision electrode beam evaporator, high-density Plasma Reactive Ion Etching and photoresist spin coater/developer. We provide system development, production, sales and services to the customer in LED, power device, and semiconductor frontend manufacturing. AST is located in Hsinchu Industrial Park in Hsinchu county, where it is 10km from the Hsinchu Science Park. AST’s vision is to build its own premier brand and become a world class semiconductor system provider. Our strategy is to combine worldwide semiconductor, automation, process application, and other elite teams in various fields, as well as establish strategic alliances with ITRI, NCTU, and NTHU to enhance R&D capabilities. AST is mainly owned by Hermes-Epitek Co., Ltd., which is the largest semiconductor service provider in Greater China with sales and service bases all over China, Taiwan, Singapore and Malaysia.

http://www.ast-taiwan.com.tw

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