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Micro Inspection System
Industry type：Health and precision instrument
Product model number：MARS
Taiwan Electron Microscope Instrument Corporation
temic’s newly launched Micro Inspection System – MARS (MIS MARS) is a customized large object inspection equipment of the MIS series, which is exclusively used for high-value large parts that cannot be broken into smaller parts. It is a solution developed for automated defect detection and abnormal component analysis. Customized chamber and carrier based on the demands provided by the customer, the innovative design overcomes sample conductivity limitations. It can be equipped with a high-precision positioning stage and a multi-sensing automatic analysis system to realize a 360 degree inspection on the object surface with patented technology. It’s also the only smart electron beam inspection equipment on the market equipped with customized analytical software.
MIS MARS’ features include customized chamber and stage (enlarge the maximum sample size and capability to inspect sample with peculiar shape in various angles), precise coordinate positioning, highly automated procedures, and advanced defect analysis engines. The communication protocol can be custom-made to connect to the users’ cloud SPC or COA systems. It’s a highly efficient inspection system that can assist customers in improving their products and manufacturing procedures.
MIS MARS has repeatedly been adopted by Taiwan’s iconic semiconductor manufacturer, becoming gradually an important quality control solution for semiconductor manufacturing parts at nodes below 10nm, complementing the monitoring of raw materials in semiconductor plants. temic will rely on MIS MARS in increasing its market share on the international market, focusing particularly on the key products for high-end industries, such as semiconductors and aviation.
About Taiwan Electron Microscope Instrument Corporation
Taiwan Electron Microscope Instrument Corporation (TEMIC) is the leading solution provider of compact e-beam inspection system.
Launched our R&D team in National Tsing Hua University, and growing stronger in Si-Soft Research Center in Hsinchu Scientific Park, with 100% of our product is made in Taiwan, TEMIC established the first Taiwan brand desk-top e-beam microscope company.
SEM team of National Tsing Hua University, the predecessor of the TEMIC, initiated the development project of desktop SEM since 2008.
The first generation of SEM product (EM100) has been officially launched at Taiwan and China. TEMIC provide the economic solution for QA/QC inspection in the electronic, material and manufacturing industries.
In advanced, TEMIC works with ITRI to establish a new product (Nereuscope) capable of examine the suspended nano-objects in liquid solution with the fluorescence imaging and electron microscopy imagining simultaneously. It is a unique method to in-situ inspect the sizes, geometries, concentrations and compositions of sub-micro/nano particles in liquid via imaging instrument. Very powerful for the applications of semiconductor incoming material inspection, content estimation in waste treatment and research of biological medicine.
