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TS2000-SE is the first 200mm automated engineering probe system on the market integrating innovative features specifically designed to minimize the complexity of test operations. The Safety Test Management system prevents opening of any doors during testing; an intelligent dew point control routine avoids acumination during cold testing; it automatically monitors CDA/Nitrogen flow and turns the chuck into safe mode when the flow is interrupted/insufficient – all makes measurements safer, more reliable by automatically maintaining a safe test environment. Together with the automated single wafer loader, TS2000-SE provides a unique capability to load/unload wafers at any chuck temperatures. This saves major downtime and increases significantly the measurement efficiency. Operations are pre-set, protected, and simplified by the intuitive, multi-touch SENTIO® Software Suite to eliminate the risk of false operations. Instrumentation integration reinforces the intuitive operation of tests.
mpi-corporation.com/ast/engineering-probe-systems/mpi-automated-systems/ts2000-se-probe-system/
