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The XY air-bearing platform CAB-XY300 features nanometer-level positioning accuracy, with a repeatability of up to ±0.25μm and an absolute (compensated) accuracy of up to ±0.5μm. It is suitable for industries requiring high-precision measurements and precise alignment, such as Micro LED, semiconductor AOI, PCB inspection, automated precision measurement, and laser cutting. The platform’s XY axes operate on the same plane, avoiding stacking errors and providing a consistent planar reference, thereby improving overall flatness and accuracy. This coplanar design offers structural stability and high rigidity, reduces vibrations, and enhances space utilization, providing users with an efficient, reliable, and precise operational platform.

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