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The ABL-300 Air Bearing Guide Module embodies INNOVALUE through advanced integration, precision, and sustainable performance. Designed for semiconductor wafer inspection, advanced packaging, and high-precision automation, it uses porous air bearing technology with graphite, porous ceramic, and sintered metal materials to create a stable air film, reducing micro-vibration, clogging risk, and wear. Its All-in-One structure integrates air bearings, vacuum preload, and a linear motor into one compact module, reducing machine height, center of gravity, and assembly complexity. Pre-calibrated before shipment, it enables plug-and-play installation without secondary alignment. With non-contact motion, zero friction, lubrication-free operation, ISO Class 1 cleanroom compatibility, nanometer-level positioning accuracy, and sub-micron repeatability, the ABL-300 delivers high value for next-generation precision manufacturing.
Award winning products in the past (14)
