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“Thermal AMC Prevention Unit” is the first thermal control equipment that can remove airborne molecular contamination (AMC). It greatly increases the yield rate and efficiency in the semiconductor and FPD industries.
This equipment has the functions of AMC removing, cleanliness control and precise temperature and humidity control to solve the problem of bad quality due to environmental factors.
【benefits】
1.Preventing the lamp from hazing:Extending the durable life of the lamp.
2.Preventing the lens from hazing:After using this equipment, it doesn’t need to clean the lens for at least 6 years.
3.Prevent the exposure from rusting inside:After using this equipment for 6 years, the evaporator is good as new without any rust.
4.Improving the yield rate of production
【specification】
Cleanliness: Class 4
Temperature accuracy range: ±0.5 °C ~ ±0.05 °C
Humidity accuracy range: ±5% RH ~ ±0.5% RH
AMC removal: >90% in main AMC
