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Thermal Control Unit-SE50(TCU-SE50) is an precise temperature control equipment for the track of 6-inch and 8-inch foundries. The temperature can be controlled within 23±0.01°C and the humidity can be controlled within 50±0.5%RH, which improves the production utilization rate and reduce the abnormal yield rate during production.
In response to the continuous narrowing of the gate width of semiconductors and the significant development of compound semiconductors, this product can meet the stringent requirements of customers and improves product yields.
Compared with competitors, TCU-SE50 uses R407C refrigerant, which is completely free of ozone-depleting components and conforms to the A1 safety class of the American Society of Heating, Refrigerating and Air-Conditioning Engineers. Moreover, we uses a heat recovery system, the current is reduced by half than the amperage of the electric heating system.
