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AMC control Unit(ACU) is a treatment equipment that can simultaneously remove more than 90% of the MA(Acid), MB(Base), and MC(Condensable) in the exhaust gas of semiconductor/optoelectronic processes.
In the semiconductor process, a large amount of chemicals must be used. When these chemical pollutants are distributed in the air, they will affect other processes and cause exhaust gas treatment problems.
ACU uses an exclusively developed Water Catalyst Net, which can convert VOCs into a hydrophilic structure, and then remove AMC through high-efficiency water washing method.
Furthermore, ACU replaces the existing equipment that is expensive and ineffective in removing target pollutants. It would be useful to treat exhaust gas, and can be used at the same time to protect products at the process end. Most important of all, it is a unique in the industry at present.
