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MultiDimensional-ZT
Industry type:Productivity and energy
Product model number:MD-ZT
HIWIN MIKROSYSTEM CORP.
award 3

HIWINMIKROSYSTEM MultiDimensional stage “MD-ZT” integrates 5 DOFs including Z, Rx, Ry, Rz and Lift-Z within only 90 mm height. MD-ZT successfully minimize the load and height when installed on XY stages. MD-ZT promotes upgrades in SEMI-industries with extreme performance & cost advantages. With precise repeatability under 60 nm, servo jitter under 6 nm, compact and flexible design, MD-ZT sets a new benchmark for the next-gen inspection platforms. MD-ZT is a technology breakthrough and a key weapon for customers to break into markets. With 4 features, we provide competitive solutions to meet the needs of system upgrading.
1.Nano-positioning: Perfect for high-end inspection in SEMI industries.
2.High bandwidth: Fast response and precise motion control for dynamic applications.
3.Compact design: 40% less in height compare to regular design. Provides more motion agility.
4.Integration of key tech: Modularized design in software & hardware minimizes cost and difficulties for system upgrade.

http://www.hiwinmikro.tw

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About HIWIN MIKROSYSTEM CORP.

HIWIN MIKROSYSTEM Corp. has been dedicated to the development and manufacturing of components, systems for linear motion and positioning control. With a complete product line, we provide different types of nano-positioning stages, torque motors, linear motors, direct drive motors, spindle motors, servo motors, vacuum motor, drive, controller, linear actuators and position measurement systems . Our product applications span various precision industries, such as semiconductor, automation, machine tool, biotech and construction. Headquartered in Taiwan, HIWIN MIKROSYSTEM Corp. has established subsidiary in Germany,Japan,USA,Italy,Switzerland,Czech Republic,Frace,Bulgaria,etc. HIWIN MIKROSYSTEM was certificated ISO9001,ISO14001,ISO14064-1,ISO45001,ISO50001 and wins several national awards. Our philosophy of management is to integrate global resources for continuous innovation and to provide high value-added products to customers through the practice of innovation, quality and service.

http://www.hiwinmikro.tw

HIWIN MIKROSYSTEM is the driving force for the "direct drive precision technology". Since its founding in 1997, it has constantly accumulated experiences and become the first "advanced direct drive technology" leading brand in Taiwan. "HIWIN MIKROSYSTEM" is constantly improving its independent R&D technology and capability. With the headquarters in Taiwan as the center, we have set up R&D centers both at home and abroad, with more than 200 researchers engaging in the R&D of new products and "key processes". We have accumulated many years of excellent experiences, have more than 642 patents, met the requirements of precision technology, you understand our job by imagining the achievement of the “precision positioning technology that enables one to see an ant in Manhattan, New York from the outer space”, and been committed to becoming the best partner to assist global precision equipment customers to achieve success.