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HIWINMIKROSYSTEM MultiDimensional stage “MD-ZT” integrates 5 DOFs including Z, Rx, Ry, Rz and Lift-Z within only 90 mm height. MD-ZT successfully minimize the load and height when installed on XY stages. MD-ZT promotes upgrades in SEMI-industries with extreme performance & cost advantages. With precise repeatability under 60 nm, servo jitter under 6 nm, compact and flexible design, MD-ZT sets a new benchmark for the next-gen inspection platforms. MD-ZT is a technology breakthrough and a key weapon for customers to break into markets. With 4 features, we provide competitive solutions to meet the needs of system upgrading.
1.Nano-positioning: Perfect for high-end inspection in SEMI industries.
2.High bandwidth: Fast response and precise motion control for dynamic applications.
3.Compact design: 40% less in height compare to regular design. Provides more motion agility.
4.Integration of key tech: Modularized design in software & hardware minimizes cost and difficulties for system upgrade.
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Award winning products in the past (10)
