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Equipment Front End Module (EFEM)
Industry type:Productivity and energy
Product model number:EFEM320系列
award 2

1.HIWIN EFEM - MIT, ballscrew, guideway, robot reducer, single axis, wafer robot, drive, servo & direct drive motor, EFEM critical parts made by HIWIN.
2.Automation of semiconductor, AOI, solar & LED. High speed, accuracy and reliability. HIWIN module design meets market needs & industrie 4.0.
3.HIWIN Module design, provides flexiblity for customization, up to eight optional wafer load/out ports, better than market two wafer load/out ports. Good quality & short lead time.
4.Provide cost-saving solutions at 20% to 40% benefit to meet key indicators- cost per wafer and cost of ownership.
5.EFEM detects wafer cassette position by sensors, controls accuracy at micron level, less than 1/10 of a human hair difference.
6.EFEM complies with SEMI S2, cleanliness level 1 & ROHS. Detect abnormalities, activate safety protection for person and equipment.
7.EFEM core technology is software. GUI design, allows remote commands, integrates subsystems by simple single command.


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HIWIN Technologies Corp. is the world leading brand of motion control and system manufacturer. With its core technologies, HIWIN focuses on creating innovative products with high speed, high precision, eco-friendly, and energy-saving. Our products, from components to sub system and system, include Ballscrew, Guideway, Bearing, Robot Reducer, Industrial Robot, Medical Robot, Torque Motor Rotary Table. HIWIN products are widely applied by the Automation, Semi-Conductor, Electronics, Medical, Precision Machine, and Transportation Industries etc. HIWIN commits to be a manufacturing service company by creating innovative intelligent products and providing mechatronic total solution to serve customers and build a great work environment and well-being to improve human’s life. With company motto “Professional Excellence, Working Enthusiasm, and Ethics & Responsibility”, HIWIN has the vision to develop a sustainable company.


HIWIN Technologies, started 1989 with own brand “HIWIN” and innovative research to the worldwide market. HIWIN stands for HI-tech WINner. With HIWIN, customer can be competitive and become hi-tech winner. CIS Color - Green as harmony and earth. Represent natural, eco-friendly, and grow. Red as heat of the earth's core. Represent sincere, positive and innovative. Through perseverance HIWIN became well-known overseas with high quality. After receiving global acknowledge, HIWIN finally won domestic recognition under the contempt of Taiwan brand. HIWIN is now top tier in motion control and system with 14 subsidiaries and over 300 distributors. HIWIN believes “Manufacturing is not a purpose, it is a means to satisfy human needs”, which leads to innovation for better life! Nikkei Business 2017 “ASIA 300 Market Growth”, HIWIN is ranked No.1! HIWIN, a MIT company, being the No.1 above the Asia public companies is a honor for Taiwan! HIWIN proves branding is difficult but rewarding.